o
- Ọkan / Meji ilẹkun
Fireemu ati iyẹwu ti wa ni ṣe ti erogba alagbara, irin.
Ilekun kọọkan n pese window ayewo fun iṣakoso wiwo ti ilana naa.Awọn odi ẹnu-ọna n pese laini irin alagbara ti o ni irọrun yiyọ fun itọju.
-Adani Igbale Iyẹwu
Iyẹwu naa pese awọn laini irin alagbara ti inu ni irọrun yiyọ kuro fun mimọ.
Awọn ifasoke duro ni apa ẹhin rẹ.
Iyẹwu naa ni lẹsẹsẹ flange kekere fun idi idiwọn.
-Ga igbale fifa eto
Diffusion fifa + Booster fifa + Mechanical fifa
- Wiwọn igbale ati iṣakoso
Pẹlu irin Pirani won + irin Ionization won
-Atunṣe gbigbe eto
-PLC Iṣakoso kuro
-Aluminiomu evaporation eto pẹlu ga agbara transformer
-Irin fireemu
Awọn be ni reasonable
Fiimu Layer jẹ aṣọ
Film akoso didara
Iyara fifa soke, iṣẹ-ṣiṣe kukuru kukuru ati ṣiṣe iṣelọpọ giga
Išišẹ jẹ rọrun
Lilo agbara kekere ati iṣẹ iduroṣinṣin
Nọmba awoṣe | EV-1000 | EV-1200 | EV-1400 | EV-1800 | EV-2000 | Awọn ilẹkun meji tabi awoṣe iyẹwu meji wa | |
Iwọn ti iyẹwu igbale (opin * giga) | 1000*1100 | 1200*1400 | 1400*1600 | 1800*2000 | 2000*2200 | ||
Ohun elo ti iyẹwu igbale | Erogba, irin, SUS304 tabi SUS316L | ||||||
Imọ-ẹrọ ti ṣiṣẹ | evaporation igbale igbale pẹlu tungsten& filaments aluminiomu, oluyipada evaporation agbara giga | ||||||
Eto fifa soke | fifa kaakiri + awọn ifasoke ẹrọ, fifa agbara | ||||||
Akoko fifa | Lati bugbamu si 5.0 * 10-2Pa kere ju iṣẹju 8 | ||||||
Igbale Ifilelẹ | 5.0 * 10-4 Pa | ||||||
Iwọn otutu ṣiṣẹ | Iwọn otutu yara | ||||||
Ipo iṣẹ | Ipo aifọwọyi tabi Afowoyi, nipasẹ 10.4 inches PLC awọn ifọwọkan iboju | ||||||
Lapapọ Agbara | 40-80kW | 70-140kW | |||||
Itẹsẹ ẹsẹ | 2 * 2 mita | 2 * 3 mita | 3 * 3 mita | 3 * 3 mita | 3 * 4 mita | 4 * 5 mita | 5 * 6 mita |
Awọn ẹya wọnyi o le ṣe aṣa | 1. Iwọn ti iyẹwu igbale 2. Awọn atunto ti awọn ifasoke | ||||||
Awọn ohun elo yiyan | 1. jijo oluwari 3. Arc ion eto ifisilẹ 4. Magntron sputtering eto |